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Korzec D,Rapp J,Theirich D,Engemann J.Cleaning of metal parts in oxygen radio frequency plasma:Process study[J].J.Vac.Sci.Technol.A 12(2),Mar/Apr 1994. 赵玲利;王守国;常压冷等离子体清洗技术在微电子工业中的应用[J].;清洗世界;2005;21(4)