EUVL
基本解释
- 极紫外光刻
英汉例句
- The principle, technological process and equipments of EUVL are discussed and its production cost, application prospects, advantages and disadvantages are also comparably analyzed.
本文论述了EUVL技术的原理、加工工艺和设备，并对比分析了EUVL的生产成本、应用前景及其优缺点。