sputtering equipment

常见例句

This paper presented a RF cylindrical magnetron sputtering equipment developed in our institute and the technique for sputtering films.
本文介绍了我所研制的RF同轴磁控溅射装置及成膜技术。
Comparing with general sputtering method, this equipment has the advantages of decreasing the sputtering voltage and increasing the rate of deposition obviously.
与普通溅射方法相比，本设备的优点是：溅射电压大大降低，而淀积速率提高很多。
A new magnetron sputtering equipment for coating microparticles was designed and fabricated according to the characteristic of the magnetron sputtering method and powder particles.
本论文根据磁控溅射及粉体颗粒的特点，设计并研制了一套微颗粒磁控溅射镀膜设备；